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第一章 系统设计
1. PDS系统定义及分类(PDS系统定义及分类可以根据不同厂区的不同要求有所改变),
NO.
Description Drain
definition
Abbreviation
1
Acid/Caustic waste water drain
incl. SC2, HCl , H2SO4 , H2O2 , Developer(不含胺,氟), scrubber and exhaust drain waste water
DWW-A
2
Reclaim water-first drain
DI (Hot & Cold) First rinse ,the waste rinse water
DRW-F
3
Reclaim water-last drain
incl. Second rinse and after rinse waste water
DRW-L
4
MUA condensate drain
MUA condensate water drain
DMUA
5
Concentrated fluoride drain
Above 1 wt % CHF waste water
DCHF
6
Diluted fluoride drain
DHF 20:1 , 50:1 , 100:1 drain, M1/ M2 ,
DDHF
7
IPA drain
IPA drain(浓)
DIPA
8
Solvent-1 drain
incl. NMP, Acetone, Diluted IPA drain waste water, GC 废溶剂排放
DSOL-1
9
Solvent-2 drain
incl. EKC waste water drain
DSOL-2
10
Local solvent-1 drain
incl. EBR waste water drain
DLocal-1
11
Local solvent-2 drain
incl. TOK 105, C260, A515 waste water drain
DLocal-2
12
Sulphuric acid drain
incl. H2SO4 drain water,
DH2SO4
13
Phosphoric acid drain
incl. H3PO4,M2 drain water,
DH3PO4
14
Grinding waste drain
incl.Backside-grinding drain water
DBG
15
Copper waste water drain
incl. Slurry-Copper clean drain water,ECP CuSO4 tools Rinse water
DWW-Cu
16
Copper concentrate drain
incl.Slurry-Copper concentrate water
DSlurry-Cu
17
Metal slurry drain
incl. Slurry-Metal drain water
DSlurry-Metal
18
Oxide slurry drain
incl. Slurry-Oxide drain water
DSlurry-Oxide
19
Floor drain
Fab I & 3B 2F floor waste water (except HF,others acid and caustic could drain to this piping)
DFloor drain
20
NH4OH drain
incl. NH4OH drain waste water,SC1,BOE 10:1, 50:1 , 130:1, BOE 1200,TMAH,
DNH4OH
21
CMP Clean Water drain
drain water
DCMP-Clean
2. PDS管路设计通则
2.1 承包商应该设计和安装附属的管道支撑钢架以增强主建筑钢构的需要2.2 大部分情况管线设计给予稍微倾斜,范围在0.3-0.5%,管线倾斜给予管线充足的排放, 同时消除介于管支架间下垂之影响2.3 管架位置必须和管线上之配件同作考虑来决定, 如重阀,主管,法兰,插接等2.4 禁止用一管道支撑另一管道2.5 水平管道吊杆应该用集中负荷型夹具附挂在钢梁上或焊接在插在混泥土内的梁片2.6 设计管路原则上不留阀,管路尽可能直接能重力流到处理点。进出建筑物时,为避免建筑物沉降影响管路使用,建议增加软接。3. PDS管路安装设计要求
3.1 通常情况下,分段的DWWA支管在联结合一后再接入DWWA主管。这种接法可能因各分段的DWWA水质不同而在联结段发生沉淀反应引起堵管的风险(LESSON LEARN 4.2)。并且为防止化学反应,堵塞管道,应该避免把local scrubber的排水连接到DWWA管路,而建议铺设单独排放到WWT系统的管路(LESSON LEARN 4.16)。3.2 不同种类的SOLVENT最好可以用不同的Drain管直接排放到相应的桶槽内,以免不同种类的Solvent相互反应而引起结晶或沉淀堵管(LESSON LEARN 4.1)。3.3 BG废水排放管路在由机台排放至管路之前建议安装沉淀槽,预沉淀其中部分容易沉淀的SS,以免造成后段堵管(LESSON LEARN 4.3)。3.4 设计施工中要考虑Drain Check Sensor与机台的连锁,是否会因sensor的异常而引起机台当机(LESSON LEARN 4.4)。3.5 施工过程中要考虑在SCRUBBER Drain系统排放管路安装过滤器,以防止因为结晶的硫酸铵堵塞管路(LESSON LEARN 4.5)。